Inspection with transparency.
0%
µInspect
Features
- Multi HDR image acquisition
- Multi wavelength image acquisition
- mIT – multi Image Technology
- Detects smaller failures than pixel resolution
- Combines different images for inspection, e.g. top light red + transmission light blue + in axe light orange
- SECS/GEM interface
- KLARF data
Models
- Laboratory system
- System with single wafer manipulation
- System with robot manipulation with single or double arm
Layout control
- Multi material layout
- Shape control
- Smaller failures than pixel resolution
- Missing structures
- Wrong structures
- Stains
- Particles
- Cracks (with transmission light)
- Incomplete release
